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Department of Environment and Science

Queensland Government

Science portfolio of the Department of Environment and Science

Department of Environment and Science

Queensland science capability directory

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Queensland Micro- and Nanotechnology Centre (QMNC)

Gallium nitride switches on a Silicon Carbide on Silicon wafer

Griffith University

The Queensland Micro- and Nanotechnology Centre (QMNC) was established in 2009 with core capabilities in microtechnology, nanotechnology and micro/nanosystems. The Centre’s expertise is in the fundamental theory of materials, materials development, microelectronics, micro electromechanical systems and microfluidics. Its research activities span the disciplines of physics, chemistry, biology, applied mathematics and engineering. The Centre’s major research projects include: SiC-based power switches for efficient energy systems; epitaxial Silicon carbide deposition onto silicon; 150mm SiC on Si wafer fabrication focused for MEMs, photonic and sensors technology; microfluidics and Lab-on-a-Chip Technology; exploration of GaN devices for power switching; materials for energy storage and conversion; transport and flow in biomedical systems; Fundamental studies on micro- and nanoscale systems; and investigations of graphene.

Website https://www.griffith.edu.au/science-aviation/queensland-micro-nanotechnology-centre

Key science sectors

Strengths and capabilities

  • Silicon carbide semiconductor technology
  • Silicon carbide device micro and nano fabrication and systems
  • Microelectronics
  • Micro-electromechanical systems
  • Microfluidics and nanofluidics
  • Process equipment development
  • Materials development
  • Fundamental theory of materials
  • Smart energy
  • Nanomaterials for clean energy and water solutions

Facilities and major equipment

  • Silicon carbide microtechnology device fabrication facility
  • Purpose-built facility including class 100 and class 1000 cleanrooms
  • Epitaxial SiC production reactor batch processing of 2" to 300mm wafers
  • National hydrogen materials reference facility
  • Raman spectroscopy laboratory
  • Synthetic laboratory
  • Atomic force microscope laboratory
  • Solid state physics laboratory
  • Micro- and nanofluidics laboratory
  • Electrochemistry laboratory

Number of research staff

20–100 research staff

Address

QMF building (N74 Room 1.04), Griffith University, West Creek Road, Nathan, 4111

Lead researchers

Organisation type

  • University Research Centre
  • National Collaborative Research Infrastructure Scheme

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Last updated:
6 September 2018